|
Footprint
|
850mm(W)*1100mm(D)*1760mm(H)
|
|
Chamber
|
500mm(W)*500mm(D)*500mm(H)
|
|
Weight
|
880kg
|
|
Facilities
|
3Ψ220V×60Hz×4w，30A
Compressed air： Reaction gas： |
|
System control software
|
PLC touch panel or PC based system controller
|
|
Gas flow system
|
2 mass flow controllers
|
|
Vacuum pump
|
Dry pump
|
|
Reactants
|
O2、CF4
|
|
Telescopic stage
|
Easy loading accessory
|
|
Cell clamp
|
Cell stack holder with stacking accessory
|
|
Consumable parts
|
NO
|
供應電池片邊緣刻蝕設備
