Comparative study of rapid and classical thermal
phosphorus di!usion on polycrystalline silicon
thin "lms
S. Bourdais!,*, G. Beaucarne", A. Slaoui!, J. Poortmans",
B. Semmache#, C. Dubois#
!CNRS, Laboratoire PHASE, 23 rue du Loess, BP20 F-67037 Strasbourg, France
"IMEC B-3001 Leuven, Belgium
#LPM INSA, F-69621 Villeurbanne, France